Thin Film Substrate
Si3N4 Ceramic substrate
Introduction:Silicon Nitride (Si<sub>3</sub>N<sub>4</sub>) has very high strength, especially for hot pressed silicon nitride, which is one of the hardest substances in the world. It is extremely resistant to high temperatures, and the strength can be maintained to a high temperature of 1200 °C without falling, until 1900 °C will decompose . We produced the Si<sub>3</sub>N<sub>4</sub> substrates by Hot pressing.
|Thermal conductivity (W/m. K)||
|Thermal Expansion (x10-6/oC)||
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