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Niobium Oxide Sputtering Targets (Nb2Ox)

Niobium Oxide Sputtering Targets (Nb2Ox)
Material Type Niobium Oxide
Symbol Nb2Ox
Color/Appearance Black, Crystalline Solid, Grey-Black
Melting Point (°C) 1,520
Theoretical Density (g/cc) 4.6
Z Ratio **1.00
Sputter RF, RF-R
Type of Bond Indium, Elastomer

General

 

Material Notes

Niobium Oxide Sputtering Targets, Purity is 99.95%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

 


Other Information of Niobium Oxide Sputtering Targets

Applications
  Ferroelectric
• Gate Dielectric

• For CMOS

Features
• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

Options
99.9% ex Strontium Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

 
 
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