Aluminum-doped Zinc Oxide (AZO) Rotary Sputtering Target
Introduction
AZO is a kind of high stability transparent conductive film material, which has high visible light transmittance and low resistivity characteristics. AZO Rotary Sputtering Targets are widely used in the thin-film solar cells, Low-e coated glass, automotive coated glass, flat panel display. Changsha Advanced Engineering Materials (AEM) produces high quality of AZO Rotary Sputtering Targets with customized sizes.
Specifications
| Materials | Aluminum-doped Zinc Oxide Rotary Sputtering Target |
| Symbol | Al2O3/ZnO, AZO |
| Composition |
Al2O3/ZnO 2/98 wt% or other ratios |
| Purity | >=99.95% |
| Theoretical Density (g/cc) | 5.56 |
| Melting Point (°C) | N/A |
| Production Method |
Bonded Type
(Cold isostatic pressing + high temperature sintering)
|
| Backing Tube | Titanium, Stainless Steel |
| Bonding Materia | Indium or Elastomer |
| Size | As per customer's drawings |
| Relative Density | >=97% |
| Resistivity (Ω.cm) | <=0.001 |
| Annual Capacity | 1000 tons |
Applications
- Thin Film Photovoltaic Solar Industry
- Semiconductor Electronics Industry
- Flat Panel Display Industry
- Construction / Automotive Glass Industry
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