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AEM Deposition
  • Technical Infomation
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  • Material Deposition Chart
    •
  • Converting Pressures Units
    •
    • Pressure
    • Pumping Speed
    • Throughput
    • Outgassing
    • Weights & Measures

    Converting Pressures Units

    To Convert Into Multiply
    atmosphere bar 1.01295
    atmosphere dynes/cm2 1.01295 x 106
    atmosphere in. Hg 29.9213
    atmosphere in. water 406.86
    atmosphere kg/cm2 1.03325
    atmosphere mbar 1012.95
    atmosphere mtorr or micron Hg 7.6 x 105
    atmosphere Pa or N/m2 1.01295 x 105
    atmosphere psi or lb/in2 14.696
    atmosphere torr or mm Hg 760
    bar atmosphere 0.9872
    bar dynes/cm2 1 x 106
    bar in. Hg 29.54
    bar in. water 401.65
    bar kg/cm2 1.02
    bar mbar 1000
    bar mtorr or micron Hg 7.5028 x 105
    bar Pa or N/m2 1 x 105
    bar psi or lb/in2 14.508
    bar torr or mm Hg 750.2838
    dynes/cm2 atmosphere 9.872 x 10-7
    dynes/cm2 bar 1 x 10-6
    dynes/cm2 in. Hg 2.954 x 10-5
    dynes/cm2 in. water 4.0165 x 10-4
    dynes/cm2 kg/cm2 1.0200 x 10-6
    dynes/cm2 mbar 1 x 10-3
    dynes/cm2 mtorr or micron Hg 0.75028
    dynes/cm2 Pa or N/m2 0.1
    dynes/cm2 psi or lb/in2 1.4508 x 10-5
    dynes/cm2 torr or mm Hg 7.5028 x 10-4
    in. Hg atmosphere 3.342 x 10-2
    in. Hg bar 3.385 x 10-2
    in. Hg dynes/cm2 3.385 x 104
    in. Hg in. water 13.598
    in. Hg kg/cm2 3.4532 x 10-2
    in. Hg mbar 33.85
    in. Hg mtorr or micron Hg 2.54 x 104
    in. Hg Pa or N/m2 3385
    in. Hg psi or lb/in2 0.4912
    in. Hg torr or mm Hg 25.4
    in. water atmosphere 2.458 x 10-3
    in. water bar 2.489 x 10-3
    in. water dynes/cm2 2.489 x 103
    in. water kg/cm2 2.5396 x 10-3
    in. water in. Hg 7.354 x 10-2
    in. water mbar 2.489
    in. water mtorr or micron Hg 1.868 x 103
    in. water Pa or N/m2 248.9
    in. water psi or lb/in2 3.612 x 10-2
    in. water torr or mm Hg 1.868
    kg/cm2 atmosphere 0.9678
    kg/cm2 bar 0.9804
    kg/cm2 dynes/cm2 9.804 x 105
    kg/cm2 in. Hg 28.958
    kg/cm2 in. water 393.76
    kg/cm2 mbar 9.804 x 102
    kg/cm2 mtorr or micron Hg 7.3554 x 105
    kg/cm2 Pa or N/m2 9.804 x 104
    kg/cm2 psi or lb/in2 14.223
    kg/cm2 torr or mm Hg 7.3554 x 102
    To Convert Into Multiply
    mbar atmosphere 9.872 x 10-4
    mbar bar 0.001
    mbar dynes/cm2 1000
    mbar kg/cm2 1.0200 x 10-3
    mbar in. Hg 2.954 x 10-2
    mbar in. water 0.4018
    mbar mtorr or micron Hg 7.5028 x 102
    mbar Pa or N/m2 100
    mbar psi or lb/in2 1.450 x 10-2
    mbar torr or mm Hg 0.75028
    mtorr or micron Hg atmosphere 1.316 x 10-6
    mtorr or micron Hg bar 1.3328 x 10-6
    mtorr or micron Hg dynes/cm2 1.3328
    mtorr or micron Hg kg/cm2 1.3595 x 10-6
    mtorr or micron Hg in. Hg 3.937 x 10-5
    mtorr or micron Hg in. water 5.353 x 10-4
    mtorr or micron Hg mbar 1.3328 x 10-3
    mtorr or micron Hg Pa or N/m2 0.13328
    mtorr or micron Hg psi or lb/in2 1.934 x 10-5
    mtorr or micron Hg torr 1 x 10-3
    Pa or N/m2 atmosphere 9.869 x 10-6
    Pa or N/m2 bar 1 x 10-5
    Pa or N/m2 dynes/cm2 10
    Pa or N/m2 kg/cm2 1.020 x 10-5
    Pa or N/m2 in. Hg 2.954 x 10-4
    Pa or N/m2 in. water 4.018 x 10-3
    Pa or N/m2 mbar 0.01
    Pa or N/m2 mtorr or micron Hg 7.5028
    Pa or N/m2 psi or lb/in2 1.4508 x 10-4
    Pa or N/m2 torr or mm Hg 7.5028 x 10-3
    psi or lb/in2 atmosphere 0.06805
    psi or lb/in2 bar 0.06893
    psi or lb/in2 dynes/cm2 6.8927 x 104
    psi or lb/in2 kg/cm2 7.0309 x 10-2
    psi or lb/in2 in. Hg 2.036
    psi or lb/in2 in. water 27.68
    psi or lb/in2 mbar 68.97
    psi or lb/in2 mtorr or micron Hg 5.171 x 104
    psi or lb/in2 Pa or N/m2 6.8927 x 103
    psi or lb/in2 torr or mm Hg 51.71
    torr or mm Hg atmosphere 1.3158 x 10-3
    torr or mm Hg bar 1.3328 x 10-3
    torr or mm Hg dynes/cm2 1.3328 x 103
    torr or mm Hg kg/cm2 1.3595 x 10-3
    torr or mm Hg in. Hg 3.937 x 10-2
    torr or mm Hg in. water 0.5353
    torr or mm Hg mbar 1.3328
    torr or mm Hg mtorr or micron Hg 1000
    torr or mm Hg Pa or N/m2 133.28
    torr or mm Hg psi or lb/in2 1.934 x 10-2

    Converting Pumping Speed Units

    To Convert Into Multiply
    ft3/min L/sec 0.47195
    ft3/min m3/hr 1.69901
    L/hr L/sec 2.77778 x 10-4
    L/min L/sec 1.66667 x 10-2
    L/sec ft3/min 2.11887
    L/sec m3/sec 0.001
    L/sec m3/hr 3.6
    m3/hr ft3/min 0.58858
    m3/hr L/sec 0.27778

    Converting Throughput Units

    To Convert Into Multiply
    atm.cc/sec Pa.L/sec 101.295
    atm.cc/sec molecules/sec 2.6868 x 1019
    atm.cc/sec torr.L/sec 0.76
    atm.cc/sec watt 0.10143
    micron.L/sec Pa.L/sec 0.13328
    molecules/sec atm.cc/sec 3.7219 x 10-20
    molecules/sec Pa.L/sec 3.7701 x 10-18
    molecules/sec torr.L/sec 2.8287 x 10-20
    molecules/sec watt 3.7701 x 10-21
    Pa.L/sec atm.cc/sec 9.872 x 10-3
    Pa.L/sec molecules/sec 2.652 x 1017
    Pa.L/sec Pa.m3/hr 3.6
    Pa.L/sec torr.L/sec 7.5028 x 10-3
    Pa.L/sec watt 43011
    torr.L/sec atm.cc/sec 1.31579
    torr.L/sec watt 0.13328
    torr.L/sec molecules/sec 3.5352 x 1019
    torr.L/sec Pa.L/sec 133.28
    watt atm.cc/sec 9.859
    watt molecules/sec 2.5 x 1020
    watt Pa.L/sec 1000
    watt torr.L/sec 7.503

    Converting Pumping Speed Units

    To Convert Into Multiply
    micron.L/(cm2.sec) Pa.L/(m2.sec) 1332.8
    micron.L/(cm2.sec) Pa.m3/(m2.sec) 1.3328
    micron.L/(cm2.sec) torr.L/(cm2.sec) 1 x 10-3
    micron.L/(cm2.sec) W/m2 1.3328
    Pa.L/(m2.sec) Pa.m3/(m2.sec) 1 x 10-3
    Pa.L/(m2.sec) micron.L/(cm2.sec) 7.5 x 10-4
    Pa.L/(m2.sec) torr.L/(cm2.sec) 7.5 x 10-7
    Pa.L/(m2.sec) W/m2 1 x 10-3
    Pa.m3/(m2.sec) micron.L/(cm2.sec) 0.75
    Pa.m3/(m2.sec) Pa.L/(m2.sec) 1000
    Pa.m3/(m2.sec) torr.L/(cm2.sec) 7.5 x 10-4
    Pa.m3/(m2.sec) W/m2 1
    torr.L/(cm2.sec) micron.L/(cm2.sec) 1000
    torr.L/(cm2.sec) Pa.L/(m2.sec) 1.3332 x 106
    torr.L/(cm2.sec) Pa.m3/(m2.sec) 1333.2
    torr.L/(cm2.sec) W/m2 1333.2
    W/m2 micron.L/(cm2.sec) 0.75
    W/m2 Pa.L/(m2.sec) 1000
    W/m2 Pa.m3/(m2.sec) 1
    W/m2 torr.L/(cm2.sec) 7.50 x 10-4

    Converting Pumping Speed Units

    To Convert Into Multiply
    ampere-turn gilbert 1.257
    ampere-turn/cm ampere-turn/in 2.54
    ampere-turn/in gilbert/cm 0.495
    ampere-turn/in ampere-turn/cm 0.3937
    ampere/cm2 ampere/in2 6.452
    angstrom microinch 0.00393
    angstrom millimicron 0.1
    angstrom cm 10-8
    angstrom nanometer 0.1
    angstrom micron 10-4
    b/mil ft grams/cm3 2.306 x 106
    Btu joule 1054
    Btu kilowatt-hour 2.929 x 10-4
    Btu ft-lb 777.6
    Btu/minute watt 17.57
    calorie (kg) joule 4184
    calorie (kg) Btu 3.968
    calorie (kg) horsepower hr 1.558 x 10-3
    calorie (kg) ft-lb 3086
    calories (kg) kilowatt-hour 1.162 x 10-3
    circular mil cm2 5.067 x 10-6
    circular mil in2 7.854 x 10-7
    circular mil sq mil 0.7854
    cm mil 393.7
    cm inch 0.3937
    cm angstrom 108
    cm2 ft2 1.076 x 10-3
    cm2 circular mil 1.974 x 105
    cm2 in2 0.155
    cm3 gallon 2.642 x 10-4
    cm3 in3 6.102 x 10-2
    cm3 quarts (liquid) 1.057 x 10-3
    cm3 liter 43011
    cm3 ft3 3.531 x 10-5
    cm3 pints (liquid) 2.113 x 10-3
    coulombs/in2 coulombs/cm2 0.155
    degree (angle) minute 60
    degree (angle) second 3600
    degree (angle) radian 0.01745
    degree/sec radian/sec 0.01745
    degree/sec revolution/sec 0.002778
    degree/sec rpm 0.1667
    dyne pound 2.248 x 10-6
    dyne gram 1.020 x 10-3
    dynes/cm2 bar 1 x 10-6
    erg dyne-cm 1
    erg kg-meter 1.020 x 10-8
    erg gram-cm 1.020 x 10-3
    erg ft-lb 7.376 x 10-8
    erg kg-calorie 2.390 x 10-11
    erg joule 10-7
    erg Btu 9.486 x 10-11
    ergs/sec Btu/min 5.691 x 10-9
    ergs/sec kilowatt 10-10
    ergs/sec ft-lb/min 4.42 x 10-6
    feet cm 30.48
    feet meter 0.3048
    ft-lb meter-kilogram 0.1383
    ft-lb cm-gram 13.826
    ft-lb cm-dyne 1.356 x 107
    ft2 in2 144
    ft2 m2 0.0929
    ft2 cm2 929
    ft3 lb. water 62.4
    ft3 liter 28.32
    ft3 pint (liquid) 59.84
    ft3 cm3 2.832 x 104
    ft3 in3 1728
    ft3 m3 0.02832
    ft3 quart (liquid) 29.92
    ft3 gallon 7.481
    ft3 yd3 0.03704
    ft3/min gallon/sec 0.1247
    ft3/min cm3/sec 471.9
    ft3/min liter/sec 0.4719
    gallon quart (liquid) 4
    gallon liter 3.785
    gallon cm3 3785
    gallon pint (liquid) 8
    gallon ft3 0.1337
    gram/cm3 lb/ft3 62.43
    gallon lb. water 8.34
    gallon in3 231
    gallon m3 3.785 x 10-3
    gallon/min liter/sec 0.064
    gallon/min ft3/sec 2.228 x 10-3
    gauss lines/in2 6.452
    gilbert ampere-turn 0.7958
    gram oz 0.03527
    gram dyne 980.7
    gram lb 2.205 x 10-3
    gram-calorie Btu 3.968 x 10-3
    gram-cm kg-meter 10-5
    gram-cm joule 9.807 x 10-5
    gram-cm ft-lb 7.233 x 10-5
    gram-cm erg 980.7
    gram-cm Btu 9.302 x 10-8
    gram-cm kg-calorie 2.344 x 10-8
    gram/cm lb/in 5.6 x 10-3
    gram/cm3 lb/circular mil ft 3.405 x 10-7
    gram/cm3 lb/in3 0.03613
    horsepower horsepower 1.014
      (metric)  
    horsepower watt 745.7
    in2 ft2 6.944 x 10-3
    in2 cm2 6.452
    in2 sq mil 106
    in2 mm2 645.2
    in2 circular mil 1.273 x 106
    in3 pint (liquid) 0.0346322
    in3 quart (liquid) 0.01732
    in3 liter 1.639 x 10-2
    in3 gallon 4.329 x 10-3
    in3 m3 1.639 x 10-5
    in3 ft3 5.787 x 10-4
    in3 cm3 16.39
    inch angstrom 2.54 x 108
    inch cm 2.54
    joule watt-hour 2.778 x 10-4
    joule kg-meter 0.102
    joule kg-calorie 2.390 x 10-4
    joule ft-lb 0.7377
    joule erg 107
    joule Btu 9.486 x 10-4
    km/hour ft/min 54.68
    km/hour cm/sec 27.78
    km2 ft2 1.076 x 107
    kilogram tons (short) 1.102 x 10-3
    kilogram lb 2.2046
    kilogram (force) dyne 980665
    kilogram-meter kilowatt-hour 2.724 x 10-6
    kiloline maxwell 103
    kilometer mile 0.6214
    kilometer feet 3281
    kilowatt ft-lb/sec 737.6
    kilowatt ft-lb/min 4.425 x 104
    kilowatt Btu/minute 56.92
    kilowatt-hour kilogram-meter 3.671 x 105
    kilowatt-hour joule 3.6 x 106
    kilowatt-hour ft-lb 2.655 x 106
    kilowatt-hour Btu 3415
    km/hour m/min 16.67
    km/hour mile/hour 0.6214
    km/hour ft/sec 0.9113
    To Convert Into Multiply
    lb water gallon 0.1198
    lb water in3 27.68
    lb water ft3 0.01602
    lb water/min ft3/sec 2.669 x 10-4
    lb/ft kg/meter 1.488
    lb/ft2 kg/m2 4.882
    lb/ft2 ft. water 0.01602
    lb/ft2 lb/in2 6.944 x 10-3
    lb/in grams/cm 178.6
    lb/in.2 lb/ft2 144
    lb/in.2 kg/m2 703.1
    lb/in.2 in. Hg 2.036
    lb/in.2 ft. water 2.307
    lb/in.2 atmosphere 0.06804
    lines/cm2 gauss 1
    lines/in2 gauss 0.155
    liter quart (liquid) 1.057
    liter pint (liquid) 2.113
    liter gallon 0.2642
    liter in3 61.02
    liter ft3 0.03531
    liter/min gallon/sec 4.403 x 10-3
    liter/min ft3/sec 5.885 x 10-4
    lumen/ft2 foot-candle 1
    m/min miles/hour 0.03728
    m/min km/hour 0.06
    m/min ft/sec 0.05468
    m/sec miles/min 0.03728
    m/sec km/min 0.06
    m/sec km/hr 3.6
    m/sec ft/sec 3.281
    m/sec ft/min 196.8
    m/sec miles/hour 2.237
    m2 sq mile 3.861 x 10-7
    m2 ft2 10.764
    m3 quarts (liquid) 1057
    m3 pints (liquid) 2113
    m3 gallon 264.2
    m3 in3 61024
    m3 ft3 35.31
    m3 cm3 106
    maxwell kiloline 10-3
    megaline maxwell 106
    meter inch 39.37
    meter feet 3.2808
    meter angstrom 1010
    mhos/mil ft megmhos/in3 15.28
    mhos/mil ft megmhos/cm3 6.015
    microhm/cm3 ohms/mil ft 6.015
    microhm/cm3 microhms/in3 0.3937
    microhm/in3 microhm/cm3 2.54
    microinch angstrom 254
    micromicron angstrom 0.01
    micron angstrom 10000
    mil inch 10-3
    mil cm 0.0025
    milliliter cm3 1
    millimeter mil 39.37
    millimeter micron 1000
    millimeter inch 0.03937
    millimeter angstrom 107
    millimicron angstrom 10
    minute seconds (angle) 60
    minutes(angle) radian 2.909 x 10-4
    mm2 in2 1.55 x 10-3
    mm2 cm2 0.01
    mm2 circular mil 1.974 x 103
    nanometer micron 10-3
    ohms/mil ft microhm/in3 0.06524
    ohms/mil ft microhm/cm3 0.1662
    ounces (fluid) liter 0.02957
    ounces (fluid) in3 1.805
    oz/in2 psi 0.0625
    pints (liquid) in3 28.88
    pints (dry) in3 33.6
    pound oz 16
    pound gram 453.6
    pound (force) dyne 444823
    quadrants (angle) radian 1.571
    quadrants (angle) minute 5400
    quadrants (angle) degree 90
    quart fluid ounce 32
    quarts (liquid) in3 57.75
    quarts (dry) in3 67.2
    radian degrees/sec 57.3
    radian quandrant 0.637
    radian minute 3438
    radian degree 57.3
    radians/sec revolutions/sec 0.1592
    radians/sec rpm 9.549
    revolution radian 6.283
    revolution quadrant 4
    revolution degree 360
    revolutions/sec rpm 60
    revolutions/sec radians/sec 6.283
    revolutions/sec degrees/sec 360
    rpm revolutions/sec 0.01667
    rpm radians/sec 0.1047
    rpm degrees/sec 6
    seconds (angle) radian 4.848 x 10-6
    spheres (solid angle) steradian 12.57
    spherical rt. angle steradian 1.571
    spherical rt. angle sphere 0.125
    spherical rt. angle hemisphere 0.25
    steradian sphere 0.07958
    steradian hemisphere 0.1592
    stere liter 103
    tons (short) lb 2000
    tons (short) kg 907.2
    tons (metric) lb 2205
    tons (metric) kg 103
    tons (long) lb 2240
    tons (long) kg 1016
    watt kilowatt 10-3
    watt ft-lb/sec 0.7376
    watt ft-lb/min 44.25
    watt ergs/sec 107
    watt Btu/min 0.05692
    watt-hour kilogram-meter 367.1
    watt-hour ft-lb 2655
    watt-hour Btu 3.414
    weber maxwell 108