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AEM Deposition

Erbium Oxide Sputtering Targets (Er2O3)

Erbium Oxide Sputtering Targets (Er2O3)
Erbium Oxide Sputtering Targets (Er2O3)
Material Type Erbium Oxide
Symbol Er2O3
Color/Appearance Pink, Solid
Melting Point (°C) 2,350
Theoretical Density (g/cc) 8.64
Z Ratio **1.00
Sputter RF, RF-R
Type of Bond Indium, Elastomer
Comments Loses oxygen.


Erbium(III) oxide, is synthesized from the lanthanide metal erbium. It was partially isolated by Carl Gustaf Mosander in 1843, and first obtained in pure form in 1905 by Georges Urbain and Charles James. It has a pink color with a cubic crystal structure. Under certain conditions erbium oxide can also have a hexagonal form. Erbium oxide is toxic when inhaled, taken orally, or injected into the blood stream in massive amounts. The effect of erbium oxides in low concentrations on humans over long periods of time has not been determined.

Material Notes

Erbium Oxide Sputtering Targets, Purity is 99.9%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm. Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity.This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock.

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