86-0731-89578196 [email protected]

Scandium Oxide Sputtering Targets (Sc2O3)

Scandium Oxide Sputtering Targets (Sc2O3)
Material Type Scandium Oxide
Symbol Sc2O3
Color/Appearance White
Melting Point (°C) 2485
Density  3860 kg/m-3
Molecular Weight 137.9
Sputter  
Exact Mass 137.897 g/mol

General

Scandium Oxide, Sc2O3, or scandia, is a high melting rare earth oxide. It is used in the preparation of other scandium compounds as well as in high-temperature systems (for its resistance to heat and thermal shock), electronic ceramics, and glass composition (as a helper material).

Material Notes

Scandium Oxide Sputtering Target, Purity is 99.99%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

 



Other Information of Scandium Oxide Sputtering Targets

Applications
  Ferroelectric
• Gate Dielectric

• For CMOS

Features
• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

Options
99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

 
 
Click for a downloadable datasheet on the Scandium Oxide Sputtering Targets (Sc2O3)
Can't find the downloadable datasheet you need? Click here to send email to get it.
Click here for answers to some of the most common questions we get asked.