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Scandium Oxide Sputtering Targets (Sc2O3)

Scandium Oxide Sputtering Targets (Sc2O3)
Material Type Scandium Oxide
Symbol Sc2O3
Color/Appearance White
Melting Point (°C) 2485
Density  3860 kg/m-3
Molecular Weight 137.9
Exact Mass 137.897 g/mol


Scandium Oxide, Sc2O3, or scandia, is a high melting rare earth oxide. It is used in the preparation of other scandium compounds as well as in high-temperature systems (for its resistance to heat and thermal shock), electronic ceramics, and glass composition (as a helper material).

Material Notes

Scandium Oxide Sputtering Target, Purity is 99.99%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.


Other Information of Scandium Oxide Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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