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AEM Deposition

Calcium Titanate Sputtering Targets (CaTiO3)

Calcium Titanate Sputtering Targets (CaTiO3)
Calcium Titanate Sputtering Targets (CaTiO3)
Material Type Calcium Titanate
Symbol CaTiO3
Color/Appearance White/off-white, Solid
Melting Point (°C) 1,975
Relative Density (g/cc) 3.98 @ 25°C
Z Ratio N/A
Sputter RF, DC
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer
Comments Disproportionates except in sputtering.


Material Notes

Calcium Titanate Sputtering Targets, Purity is 99.99%;Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

Other Information of Calcium Titanate Sputtering Targets

• Gate Dielectric

• For CMOS

• Non-volatile Memory
• Thin film capacitor


• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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