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AEM Deposition

Magnesium Oxide Sputtering Targets (MgO)

Magnesium Oxide Sputtering Targets (MgO)
Magnesium Oxide Sputtering Targets (MgO)
Material Type Magnesium Oxide
Symbol MgO
Color/Appearance White, Crystalline Solid
Melting Point (°C) 2,852
Theoretical Density (g/cc) 3.58
Z Ratio 0.411
Sputter RF, RF-R, DC
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer
Comments Evaporates in 10-3 Torr O2 for stoichiometry.


MgO is prized as a refractory material, i.e. a solid that is physically and chemically stable at high temperatures. It has two useful attributes: high thermal conductivity and low electrical conductivity. "By far the largest consumer of magnesia worldwide is the refractory industry, which consumed about 56 % of the magnesia in the United States in 2004, the remaining 44 % being used in agricultural, chemical, construction, environmental, and other industrial applications." MgO is used as a basic refractory material for crucibles.

It is a principal fireproofing ingredient in construction materials. As a construction material, magnesium oxide wallboards have several attractive characteristics: fire resistance, termite resistance, moisture resistance, mold and mildew resistance, and strength.

Material Notes

Magnesium Oxide Sputtering Targets, Purity is 99.95%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.



Other Information of Magnesium Oxide Sputtering Targets

  Non-volatile Memory or Ferroelectric RAM

• Thin film capacitors

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

99.95% Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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