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AEM Deposition

Ruthenium Oxide Sputtering Targets (RuO2)

Ruthenium Oxide Sputtering Targets (RuO2)
Ruthenium Oxide Sputtering Targets (RuO2)
Material Type Ruthenium Oxide
Symbol RuO2
Color/Appearance Dark Black, Solid
Melting Point (°C) 1,200
Theoretical Density (g/cc) 6.97
Water Solubility Insoluble
Sputter RF, RF-R, DC
Type of Bond Indium, Elastomer

Direct current reactive sputtering deposition of ruthenium oxide thin films (bottom and top electrodes) at 400°C are performed to produce a solid-state thin-film supercapacitor (TFSC).

Material Notes

Ruthenium Oxide Sputtering Target, Purity is 99.9%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.


Other Information of Ruthenium Oxide Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

• 99.9% ex Strontium Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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