Ruthenium is a chemical element with the symbol Ru and atomic number 44. It is a rare transition metal belonging to the platinum group of the periodic table. Like the other metals of the platinum group, ruthenium is inert to most other chemicals. Ruthenium is usually found as a minor component of platinum ores. Its annual production is about 20 tonnes. Most of the produced ruthenium is used in wear-resistant electrical contacts and thick-film resistors. A minor application for ruthenium is in Platinum alloys and as a chemistry catalyst.
Ruthenium Sputtering Targets Information
Ruthenium Sputtering Targets
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
Bonding is recommended for these materials. Many materials have characteristics that are not amenable to sputtering, such as brittleness and low thermal conductivity. This material may require a special ramp up and ramp down procedures. This process may not be necessary for other materials. Targets that have low thermal conductivity are susceptible to thermal shock.
Three-layer electrolytic process
• Melting and casting
Electrical resistance furnace - Semi-continuous casting
• Grain refinement
• Cleaning and final packaging - Cleaned for use in vacuum
Protection from environmental contaminants
Protection during shipment
• 99.9% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service