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AEM Deposition

Rhenium Sputtering Targets (Re)

Rhenium Sputtering Targets (Re)
Rhenium Sputtering Targets (Re)
Material Type Rhenium
Symbol Re
Atomic Weight 186.207
Atomic Number 75
Color/Appearance Grayish White, Metallic
Thermal Conductivity 48 W/m.K
Melting Point (°C) 3,180
Coefficient of Thermal Expansion 6.2 x 10-6/K
Theoretical Density (g/cc) 21.02
Z Ratio 0.15
Sputter DC
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer


Rhenium is a chemical element with symbol Re and atomic number 75. It is a silvery-white, heavy, third-row transition metal in group 7 of the periodic table. With an estimated average concentration of 1 part per billion (ppb), rhenium is one of the rarest elements in the Earth's crust. The free element has the third-highest melting point and highest boiling point of any element at 5873 K. Rhenium resembles manganese and technetium chemically and is mainly obtained as a by-product of the extraction and refinement of molybdenum and copper ores. Rhenium shows in its compounds a wide variety of oxidation states ranging from -1 to +7.

Material Notes

Rhenium Sputtering Targets, Purity is 99.9%;Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

Other Information of Rhenium Sputtering Targets

• Semiconductor
• Flat panel displays
Competitive pricing
• High purity
• Grain refined, engineered microstructure
• Semiconductor grade

Manufacturing Process
  Three-layer electrolytic process
• Melting and casting
  Electrical resistance furnace - Semi-continuous casting
• Grain refinement
  Thermomechanical treatment
• Cleaning and final packaging - Cleaned for use in vacuum
  Protection from environmental contaminants
  Protection during shipment
99.9% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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