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AEM Deposition

Germanium Oxide Sputtering Targets (GeO2)

Germanium Oxide Sputtering Targets (GeO2)
Germanium Oxide Sputtering Targets (GeO2)
Material Type Germanium Oxide
Symbol GeO2
Color/Appearance White
Melting Point (°C) 1115
Density  6.239 g/cm3
Molecular Weight 104.6
Exact Mass 91.9317 g/mol


Germanium Oxide also called germanium oxide and germania, is an inorganic compound with the chemical formula GeO2. It is the main commercial source of germanium. It also forms as a passivation layer on pure germanium in contact with atmospheric oxygen. Germanium dioxide can be prepared in both crystalline and amorphous forms. 

Material Notes

Germanium Oxide Sputtering Target, Purity is 99.99%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.


Other Information of Germanium Oxide Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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