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AEM Deposition

Lutetium Oxide Sputtering Targets (Lu2O3)

Lutetium Oxide Sputtering Targets (Lu2O3)
Lutetium Oxide Sputtering Targets (Lu2O3)
Material Type Lutetium Oxide
Symbol Lu2O3
Color/Appearance White
Melting Point (°C) 2490
Density  9.42 g/cm3
Molecular Weight 397.93
Exact Mass 397.866

Lutetium Oxide Sputtering Target

Lutetium Oxide, a white solid, is a cubic compound of lutetium sometimes used in the preparation of specialty glasses. It is also called lutecia. It is a lanthanide oxide, also known as a rare earth. Lutetium(III) oxide is an important raw material for laser crystals. It also has specialized uses in ceramics, glass, phosphors, and lasers. Lutetium(III) oxide is used as a catalyst in cracking, alkylation, hydrogenation, and polymerization. The band gap of lutetium oxide is 5.5 eV.

Lutetium Oxide Sputtering Target Information

Lutetium Oxide Sputtering Target
Purity is 99.99%; 
Circular: Diameter <= 14inch, Thickness >= 1mm;
Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

Other Information of Lutetium Oxide Sputtering Target


•  Ferroelectric
• Gate Dielectric

• For CMOS


• High purity
• Custom Sizes Available

Manufacturing Process

• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment


• 99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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