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AEM Deposition

Lithium Silicate Sputtering Targets (Li4SiO4)

Lithium Silicate Sputtering Targets (Li4SiO4)
Lithium Silicate Sputtering Targets (Li4SiO4)Lithium Silicate Sputtering Targets (Li4SiO4)Lithium Silicate Sputtering Targets (Li4SiO4)
Material Type Lithium Silicate
Symbol Li4SiO4
Color/Appearance White, Solid
Melting Point (°C) 1,256
Theoretical Density (g/cc) 2.40
Water Solubility Insoluble
Sputter RF, RF-R, DC
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer


Lithium Silicate Sputtering Targets are promissing materials for use as thin-flim electrlytes in lithium cells. Li4SiO4 thin films can be deposited by pulsed laser depsoition (PLD) technique, and the films have good ionic conductivities and stable. The batteries performed good stabilites for cycles.

Material Notes

Lithium Silicate Sputtering Targets, Purity is 99.99%; Circular: Diameter <= 14inch, Thickness <= 15 mm; Block: Length <= 120 +/-0.1 mm, Width <= 120 +/-0.1 mm,Thickness <= 15 mm. 

Other Information of Lithium Silicate Sputtering Targets


  Solid lithium battery electrolyte
• High purity
• High Density (Relative density >=85%)
• Single Phase
• Custom Sizes Available

Manufacturing Process
•  In-house powder synthesis, High purity metal oxide precursor materials, High energy mixing, Particle sizing processes
• Multiple step densification, Proprietary processes employed for pressing and sintering
• Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants, Protection during shipment
99.9% Minimum Purity

Bonding Services Available, Elastomer bonding is recommended

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