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AEM Deposition

Lithium Tantalate Sputtering Targets (LiTaO3)

Lithium Tantalate Sputtering Targets (LiTaO3)
Lithium Tantalate Sputtering Targets (LiTaO3)Lithium Tantalate Sputtering Targets (LiTaO3)Lithium Tantalate Sputtering Targets (LiTaO3)
Material Type Lithium Tantalate
Symbol LiTaO3
Color/Appearance White, Solid
Melting Point (°C) 1,650
Theoretical Density (g/cc) 7.46
Water Solubility Insoluble
Sputter RF, RF-R, DC
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer

Lithium Tantalate Sputtering Target

The structure of Lithium Tantalate (LiTaO3) is Perovskite, has high bulk conductivity. Lithium tantalate, similarly to lithium niobate, is an interesting ferroelectric material. Its amorphous form has been suggested as a possible solid electrolyte material for lithium ions. Lithium-ion batteries are the enabling technology for a variety of modern day devices, including cell phones, laptops and electric vehicles. 

Lithium Tantalate Sputtering Target

Lithium Tantalate Sputtering Targets
Purity is 99.95%;
Circular: Diameter <= 14inch, Thickness <= 15 mm;
Block: Length <= 120 +/-0.1 mm, Width <= 120 +/-0.1 mm,Thickness <= 15 mm.

Other Information of Lithium Tantalate Sputtering Target


•  Electrochromic glass 
•  Negative Electrode Materials for Li-Ion and Li-Batteries
•  Solid electrolyte material for lithium ions
•  Pyroelectric, ferroelectric microelectronics


• High purity
• High Density (Relative density >=85%)
• Single Phase
• Custom Sizes Available

Manufacturing Process

•  In-house powder synthesis, High purity metal oxide precursor materials, High energy mixing, Particle sizing processes
• Multiple step densification, Proprietary processes employed for pressing and sintering
• Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants, Protection during shipment


• 99.95% Minimum Purity

•Bonding Services Available, Elastomer bonding is recommended

Related Products of Lithium Tantalate Sputtering Target

Ceramic Sputtering Targets
Lithium Cobalt Oxide Sputtering Target
Evaporation Materials
Lithium Evaporation Pellet
Metal Powders

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