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AEM Deposition

Lithium Tantalate Sputtering Targets (LiTaO3)

Lithium Tantalate Sputtering Targets (LiTaO3)
Lithium Tantalate Sputtering Targets (LiTaO3)Lithium Tantalate Sputtering Targets (LiTaO3)Lithium Tantalate Sputtering Targets (LiTaO3)
Material Type Lithium Tantalate
Symbol LiTaO3
Color/Appearance White, Solid
Melting Point (°C) 1,650
Theoretical Density (g/cc) 7.46
Water Solubility Insoluble
Sputter RF, RF-R, DC
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer


The structure of Lithium Tantalate (LiTaO3) is Perovskite, has high bulk conductivity. Lithium tantalate, similarly to lithium niobate, is an interesting ferroelectric material. Its amorphous form has been suggested as a possible solid electrolyte material for lithium ions. Lithium-ion batteries are the enabling technology for a variety of modern day devices, including cell phones, laptops and electric vehicles. 

Material Notes

Lithium Tantalate Sputtering Targets, Purity is 99.95%; Circular: Diameter <= 14inch, Thickness <= 15 mm; Block: Length <= 120 +/-0.1 mm, Width <= 120 +/-0.1 mm,Thickness <= 15 mm. 

Other Information of Lithium Tantalate Sputtering Targets


  Electrochromic glass 
  Negative Electrode Materials for Li-Ion and Li-Batteries

  Solid electrolyte material for lithium ions
  Pyroelectric, ferroelectric microelectronics
High purity
• High Density (Relative density >=85%)
• Single Phase
• Custom Sizes Available

Manufacturing Process
•  In-house powder synthesis, High purity metal oxide precursor materials, High energy mixing, Particle sizing processes
• Multiple step densification, Proprietary processes employed for pressing and sintering
• Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants, Protection during shipment
• 99.95% Minimum Purity

Bonding Services Available, Elastomer bonding is recommended

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