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Lithium Tantalate Sputtering Targets (LiTaO3)

Lithium Tantalate Sputtering Targets (LiTaO3)
Material Type Lithium Tantalate
Symbol LiTaO3
Color/Appearance White, Solid
Melting Point (°C) 1,650
Theoretical Density (g/cc) 7.46
Water Solubility Insoluble
Sputter RF, RF-R, DC
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer


Material Notes

Lithium Tantalate Sputtering Targets, Purity is 99.9%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

Other Information of Lithium Tantalate Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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