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AEM Deposition

Lutetium Sputtering Targets (Lu)

Lutetium Sputtering Targets (Lu)
Lutetium Sputtering Targets (Lu)
Material Type Lutetium
Symbol Lu
Color/Appearance Silvery White Metal
Melting Point (°C) 1652
Molecular Weight 174.97
Density 9.840 g/cm3
Thermal Conductivity 0.164 W/cm/K
Thermal Expansion 9.9 µm/(m·K)
Type of Bond  Indium, Elastomer


Lutetium resists corrosion in dry air, but not in moist air. Lutetium is the last element in the lanthanide series, and it is traditionally counted among the rare earths. Lutetium is sometimes considered the first element of the 6th-period transition metals, although lanthanum is more often considered as such. Lutetium is not a particularly abundant element, although it is significantly more common than silver in the earth's crust. It has few specific uses.

Material Notes

Lutetium Sputtering Target, Purity is 99.9%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

Other Infomation of Lutetium Sputtering Targets

• Semiconductor
• Chemical vapor deposition (CVD) and physical vapor deposition (PVD) display 
Competitive pricing
• High purity
• Grain refined, engineered microstructure
• Semiconductor grade

Manufacturing Process
  Three-layer electrolytic process
• Melting and casting
  Electrical resistance furnace - Semi-continuous casting
• Grain refinement
  Thermomechanical treatment
• Cleaning and final packaging - Cleaned for use in vacuum
  Protection from environmental contaminants
  Protection during shipment
• Planar circular targets up to 18'' (457mm) diameter
• Planar tiles up to 48''(1200mm) X 15.75''(400mm) for larger target configurations
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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