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AEM Deposition

Cerium Sputtering Targets (Ce)

Cerium Sputtering Targets (Ce)
Cerium Sputtering Targets (Ce)
Material Type Cerium
Symbol Ce
Atomic Weight 140.116
Atomic Number 58
Color/Appearance Silvery White, Metallic
Thermal Conductivity 11 W/m.K
Melting Point (°C) 798
Coefficient of Thermal Expansion 6.3 x 10-6/K
Theoretical Density (g/cc) ~6.70
Z Ratio **1.00
Sputter DC, RF
Max Power Density*
(Watts/Square Inch)
UN Number 1333


Cerium is a soft, ductile, silvery-white metallic chemical element with symbol Ce and atomic number 58. Cerium tarnishes when exposed to air, and it is soft enough to be cut with a knife. Cerium is the second element in the lanthanide series, and while it often shows the +3 state characteristic of the series, it also exceptionally has a stable +4 state that does not oxidize water. It is also traditionally considered to be one of the rare earth elements. Cerium has no biological role, and is not very toxic.

Material Notes

Cerium Sputtering Targets, Purity is 99.9%;
Circular: Diameter <= 14inch, Thickness >= 1mm;
Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.


Other Information of Cerium Sputtering Targets

• Semiconductor
• Flat panel displays
Competitive pricing
• High purity
• Grain refined, engineered microstructure
• Semiconductor grade

Manufacturing Process
  Three-layer electrolytic process
• Melting and casting
  Electrical resistance furnace - Semi-continuous casting
• Grain refinement
  Thermomechanical treatment
• Cleaning and final packaging - Cleaned for use in vacuum
  Protection from environmental contaminants
  Protection during shipment
99.9% minimum purity
• Semiconductor grade cerium compound targets
Sm(1-x)CexCuO4, Pr(1-x)CexMnO3, Gd0.2Ce0.8O2, Ce2.5Y0.5Fe5O12, Ce2.2Bi0.8Fe5O12, BaCe(1-x-y)Y(x)Zr(y)O3, CeO2, CeF3
• Sputtering target bonding service

Sputtering Targets FAQ
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