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Cerium Oxide Sputtering Targets (CeO2)

Cerium Oxide Sputtering Targets (CeO2)
Material Type Cerium (IV) Oxide
Symbol CeO2
Color/Appearance White or Pale Yellow, Crystalline Solid
Melting Point (°C) ~2,600
Z Ratio **1.00
Sputter RF, RF-R
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer
Comments Very little decomposition.


Cerium(IV) oxide, also known as ceric oxide, ceric dioxide, ceria, cerium oxide or cerium dioxide, is an oxide of the rare earth metal cerium. It is a pale yellow-white powder with the chemical formula CeO2. It is an important commercial product and an intermediate in the purification of the element from the ores. The distinctive property of this material is its reversible conversion to a nonstoichiometric oxide.

Material Notes

Cerium Oxide Sputtering Targets, Purity is 99.9%;Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

Other Information of Cerium Oxide Sputtering Targets

• Gate Dielectric

• For CMOS

• Non-volatile Memory
• Thin film capacitor


• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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