Vanadium Sputtering Targets (V)
Material Type | Vanadium |
Symbol | V |
Atomic Weight | 50.9415 |
Atomic Number | 23 |
Color/Appearance | Silvery Gray Metallic |
Thermal Conductivity | 30.7 W/m.K |
Melting Point (°C) | 1,890 |
Coefficient of Thermal Expansion | 8.4 x 10-6/K |
Theoretical Density (g/cc) | 5.96 |
Z Ratio | 0.53 |
Sputter | DC |
Max Power Density* (Watts/Square Inch) |
50 |
Type of Bond | Indium, Elastomer |
Comments | Wets Mo. E-beam-evaporated films preferred. |
Vanadium Sputtering Targets
Vanadium is a medium-hard, ductile, steel-blue metal. It is harder than most metals and steels. Vanadium has good corrosion resistance, and it is stable against alkalis and sulfuric and hydrochloric acids. It is oxidized in air at about 933 K (660 ℃, 1220 ℉), although an oxide passivation layer forms even at room temperature. High-purity vanadium is used as a barrier in the integrated circuit to prevent diffusion between Gold's conductive and Nickel's bonding layers. Vanadium has a high melting point and can withstand a large current density. Thus, the vanadium sputtering targets are often used as the film material in the integrated circuits. Some vanadium sputtering targets also used as materials in surface coating. Besides, vanadium alloy targets (NiV) are widely used in solar film battery, electronic, semiconductor, and construction glasses.
Vanadium Sputtering Targets Information
Vanadium Sputtering Targets
Purity: 99.5%-99.9%
Circular: Diameter <= 14 inch, Thickness >= 1mm
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm
Targets Type: Planar sputtering target, Rotary sputtering target
More Information on Vanadium Sputtering Targets
Applications• Electronics• Semiconductor • PVD & CVD • Surface coating |
Features• Competitive pricing• High purity • Grain refined, Engineered microstructure (the average grain size < 100 um) • Semiconductor grade |
Manufacturing Process• Melting (EB)• Analysis (GDMS, ICP-OES, LECO) • Grain refinement Thermomechanical treatment (Forging, Rolling, Annealing) • Cleaning and final packaging - Cleaned for use in vacuum Protection from environmental contaminants Protection during shipment |
Options• 99.5% minimum purity• Vanadium alloys available, such as NiV • Smaller sizes also available for R&D applications • Sputtering target bonding service |
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Evaporation Materials Vanadium Pellet |
Metal |
Metal Powders |
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