How to Correctly Install Sputtering Target and Precautions?
views, Updated: 2021-09-30
The sputtering target material is the raw material for preparing sputtering deposited films. It is mainly used in electronic and information industries, such as integrated circuit, information storage, LCD, laser memory, electronic controller and other occasions. The installation of a sputtering target is an important task.
If the sputtering target is not installed correctly or in place, it is likely to lead to miss target or target cracking. Therefore, it is necessary to choose the right installation method. Because of the different equipment manufacturers, the installation methods of the target materials are also different. In general, we should install in strict accordance with the user manual provided by the equipment manufacturer. At the same time, we also need to pay attention to some details in the installation process.
The most important thing to pay attention to during the target installation is to ensure a good heat conduction connection between the target and the sputtering gun's cooling wall. If the warpage degree of cooling wall or the warpage of backplate is serious, the target cracks or bend when it is installed, the thermal conductivity from back target to target can be greatly affected, failing heat emission during the sputtering process, which eventually causes the target to crack or miss. To ensure sufficient thermal conductivity, a layer of graphite paper can be placed between the cathode cooling wall and the target (see Figure 1). Please pay attention to carefully check and clarify the flatness of the cooling wall of the sputtering gun used, and ensure that the O-ring is always in place (see Figure 2).
Due to the cleanness of the cooling water used and the dirt generated during the operation of the equipment, it is necessary to check and clean the cathode cooling water tank when installing the target materials. It ensures that the cooling water circulation is smooth and the inlet and outlet are not blocked (see Figure 3). Some cathodes are designed to have a small gap with the anode, so it is necessary to ensure that there is no contact between the cathode and the anode and there is no conductor when installing the target; otherwise a short circuit can occur (Figure 4).
For specific installation problems, please refer to the operation manual provided by the equipment manufacturer. If there is no such information in the user's manual. In that case, you can refer to the following methods: When tightening the target fixture, please first tighten one bolt by hand, and then tighten another bolt on the diagonal by hand. Repeat this until all bolts are installed, and then tighten it with tools.
AEM Deposition, as a professional sputtering target supplier, provides all kinds of the pure metal sputtering target, alloy sputtering target, and ceramic compound sputtering target. If you need to buy sputtering target or have questions during sputtering, please email us for consultation! E-mail: [email protected]