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Antimony Oxide Sputtering Targets (Sb2O3)

Antimony Oxide Sputtering Targets (Sb2O3)
Material Type Antimony Oxide
Symbol Sb2O3
Color/Appearance White, Crystalline Solid
Melting Point (°C) 656
Theoretical Density (g/cc) 5.60
Z Ratio  
Sputter RF-R
Max Power Density*
(Watts/Square Inch)
20
Type of Bond Indium, Elastomer
Comments  

General

Antimony (III) oxide is the inorganic compound with the formula Sb2O3. It is the most important commercial compound of antimony. It is found in nature as the minerals valentinite and senarmontite. Like most polymeric oxides, Sb2O3 dissolves in aqueous solutions with hydrolysis.

Material Notes

Antimony Oxide Sputtering Targets, Purity is 99.99%;Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.
 


Other Information of Antimony Oxide Sputtering Targets

Applications
  Ferroelectric
• Gate Dielectric

• For CMOS

Features
• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

Options
99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

 
 
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