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AEM Deposition

Neodymium Aluminate Sputtering Targets (NdAlO3)

Neodymium Aluminate Sputtering Targets (NdAlO3)
Neodymium Aluminate Sputtering Targets (NdAlO3)
Material Type Neodymium Aluminate
Symbol NdAlO3
Color/Appearance Light grey, Solid
Melting Point (°C) 2,233
Theoretical Density (g/cc) 7.24
Water Solubility (g/100mL) 0.0003 @ 75°C
Sputter RF, RF-R, DC
Type of Bond Indium, Elastomer



Material Notes

Neodymium Aluminate Sputtering Targets, Purity is 99.9%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.



Other Information of Neodymium Aluminate Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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