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AEM Deposition

Neodymium Oxide Sputtering Targets (Nd2O3)

Neodymium Oxide Sputtering Targets (Nd2O3)
Neodymium Oxide Sputtering Targets (Nd2O3)
Material Type Neodymium Oxide
Symbol Nd2O3
Color/Appearance Light blue, Solid
Melting Point (°C) 2,272
Theoretical Density (g/cc) 7.24
Water Solubility (g/L) 0.0019
Sputter RF, RF-R, DC
Type of Bond Indium, Elastomer


Neodymium(III) oxide or neodymium sesquioxide is the chemical compound composed of neodymium and oxygen with the formula Nd2O3. It forms very light grayish-blue hexagonal crystals. The rare earth mixture didymium, previously believed to be an element, partially consists of neodymium(III) oxide.

Material Notes

Neodymium Oxide Sputtering Targets, Purity is 99.9%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.


Other Information of Neodymium Oxide Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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