Common Sputtering Back Plate Materials and Instructions for Reuse
are divided into panel and back plate. Depending on the material, the sputtering target back plate is also different. At present, the common sputtering target back plate materials are mainly oxygen free copper, molybdenum, stainless steel tubes, indium and other back plate materials. The details are as follows:
Back palte material
Oxygen free copper (OFC) - at present, the most commonly used material for back plate is oxygen free copper, because it has good conductivity and thermal conductivity, and is easy to machine. If the maintenance is appropriate, the oxygen free copper back plate can be reused 10 times or more.
Molybdenum (Mo) - in some special conditions of use, such as high temperature bonding, copper oxide free is easy to be oxidized and warped, so metal molybdenum will be used as the back plate material or the number of thermal expansion system of some targets, such as ceramics or even some metal targets, can not match with copper oxide free, so metal molybdenum also needs to be used as the back plate material.
Stainless steel tube (SST) - at present, stainless steel tube is most commonly used as the back tube of rotating target, because stainless steel tube has good strength and thermal conductivity and is very economical.
Back plate reuse
Most of the back plate can be reused, especially those with indium are easy to clean and reuse. If other coating agents (including epoxy resin) are used, the back plate surface may need to be treated by mechanical treatment before reuse.
For the used back plate, first of all, the target should be unloaded, and the back plate should be completely inspected. The inspection focus includes the flatness, integrity and sealing of the back plate. Then confirm whether to reuse according to the results of back plate inspection.
AEM deposition, as a professional sputtering target manufacturer
, specializes in producing and providing all kinds of pure metal sputtering targets, alloy sputtering targets, ceramic sputtering targets, etc. See the table below for details:
Interested friends can click the above link to go to the product page to learn more. You can also contact us directly by email: [email protected]