How to Clean the Dust and Dirt on the Surface of Sputtering Target?
Sputtering target is a kind of coating material. According to different materials, sputtering target
can be divided into pure metal sputtering target, alloy sputtering target and ceramic compound sputtering target. Please refer to the following table for specific application and classification:
We can see that there are many kinds of sputtering targets, and the application scope and direction are also very wide, but we will not elaborate them here. Today, I would like to talk about the cleaning of sputtering targets.
In the process of using sputtering target, there may be dust or dirt in the target. There may be many reasons, such as not using vacuum packaging, not wearing gloves before use, more dust in storage or use space, etc. So, when we encounter dust or dirt on the target surface, what should we do? How to clean it is safer?
Here we need to pay attention to a problem: different materials and cleaning methods. Next, the author analyzes from two aspects: pure metal target and ceramic target: how to clean the target surface correctly?
Surface cleaning of pure metal sputtering target:
Step 1: clean with a soft lint free cloth soaked in acetone;
Step 2: clean with alcohol;
Step 3: clean with deionized water.
Step 4: after cleaning with deionized water, place the target in the oven and dry at 100 ℃ for 30 minutes.
Surface cleaning of oxide and ceramic sputtering targets:
Step 1: clean with "lint free cloth".
Step 2: after removing the dirty area, flush the target with argon with high pressure and low water, to remove all foreign particles that may cause arcing in the sputtering system.
AEM deposition, as a professional sputtering target supplier
, can provide all kinds of pure metal sputtering target, alloy sputtering target and ceramic compound sputtering target. If you need to buy sputtering target or have questions during the use of sputtering target, please email us for consultation! E-mail: [email protected]