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Sputtering Targets
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| Material | Formular | Purity | Sputtering Target | Evaporation Materials | |
|---|---|---|---|---|---|
| Pure Metal | Tantalum | Ta | 99.95% | detail | detail |
| Compounds | Tantalum Carbide | TaC | 99.5% | detail | |
| Compounds | Tantalum Nitride | TaN | 99.5% | detail | |
| Compounds | Tantalum Oxide | Ta2O5 | 99.9% | detail | detail |
| Compounds | Tantalum Oxide | Ta2Ox | 99.9% | detail | |
| Compounds | Tantalum Silicide | TaSi2 | 99.5% | detail |