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Tantalum Oxide Evaporation Material (Ta2O5)

Tantalum Oxide Evaporation Material (Ta2O5)
Material Type Tantalum Pentoxide
Symbol Ta2O5
Color/Appearance White, Crystalline Solid
Melting Point (°C) 1,872
Theoretical Density (g/cc) 8.2
Z Ratio 0.3
E-Beam Good
Thermal Evaporation Techniques Boat:  Ta
Coil:  W
Basket:  W
Crucible:  VitC
E-Beam Crucible Liner Material Fabmate®, Tantalum
Temp. (°C) for Given Vap. Press. (Torr) 10-8:  1,550
10-6:  1,780
10-4:  1,920
Comments Slight decomposition. Evaporate Ta in 10-3 Torr O2.


Tantalum pentoxide, also known as tantalum(V) oxide, is the inorganic compound with the formula Ta2O5. It is a white solid that is insoluble in all solvents but is attacked by strong bases and hydrofluoric acid. Ta2O5 is an inert material with a high refractive index and low absorption (i.e. colourless), which makes it useful for coatings. It is also extensively used in the production of capacitors, due to its high dielectric constant.

Material Notes

AEM Deposition provides Tantalum Oxide pellets, Tantalum Oxide pieces, and Tantalum Oxide powder for sale, purity is 99.9%.

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