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AEM Deposition

Hafnium Oxide Evaporation Material (HfO2)

Hafnium Oxide Evaporation Material (HfO2)
Hafnium Oxide Evaporation Material (HfO2)
Material Type Hafnium Oxide
Symbol HfO2
Color/Appearance White, Crystalline Solid
Melting Point (°C) 2,758
Theoretical Density (g/cc) 9.68
Z Ratio **1.00
E-Beam Fair
E-Beam Crucible Liner Material Direct in Hearth
Temp. (°C) for Given Vap. Press. (Torr) 10-4:  ~2,500
Export Control (ECCN) 1C231
Comments Film HfO.


Hafnium oxide is an inorganic compound with a chemical formula of HfO2. It has a density of 9.68 g/cc, a melting point of 2,758°C, and a vapor pressure of 10-4 Torr at 2,500 °C. It is off-white in color and generally considered to be one of the more stable hafnium compounds. Hafnium oxide has been utilized significantly in recent years as an addition to computer chips as a way to improve the speed and efficiency of processors. It is also evaporated under vacuum for optical coatings and semiconductor fabricat

Material Notes

AEM Deposition provides Hafnium Oxide pellets, Hafnium Oxide pieces, and Hafnium Oxide powder for sale, purity is 99.9%.

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