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AEM Deposition

Niobium Oxide Sputtering Targets (Nb2O5)

Niobium Oxide Sputtering Targets (Nb2O5)
Niobium Oxide Sputtering Targets (Nb2O5)
Material Type Niobium (V) Oxide
Symbol Nb2O5
Color/Appearance White, Crystalline Solid, Grey-Black
Melting Point (°C) 1,485
Theoretical Density (g/cc) 4.6
Z Ratio **1.00
Sputter RF, RF-R
Type of Bond Indium, Elastomer


Niobium pentoxide is the inorganic compound with the formula Nb2O5. It is a colourless insoluble solid that is fairly unreactive. It is the main precursor to all materials made of niobium, the dominant application being alloys, but other specialized applications include capacitors, lithium niobate, and optical glasses.

Material Notes

Niobium Pentoxide Sputtering Targets, Purity is 99.95%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.


Other Information of Niobium Oxide Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

• 99.9% ex Strontium Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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