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Niobium Nitride Sputtering Targets (NbN)

Niobium Nitride Sputtering Targets (NbN)
Material Type Niobium Nitride
Symbol NbN
Color/Appearance Gray, Crystalline Solid
Melting Point (°C) 2,573
Theoretical Density (g/cc) 8.4
Z Ratio 1.00
Sputter RF, RF-R
Type of Bond Indium, Elastomer
Comments Reactive. Evaporates Nb in 10-3Torr N2.

General

Niobium nitride is a compound of niobium and nitrogen (nitride) with the chemical formula NbN. At low temperatures (about 16 K) NbN, niobium nitride becomes a superconductor, and is used in detectors for infrared light. Niobium nitride is a compound of niobium and nitrogen (nitride) with the chemical formula NbN. At low temperatures (about 16 K) NbN, niobium nitride becomes a superconductor, and is used in detectors for infrared light. Niobium nitride is a compound of niobium and nitrogen (nitride) with the chemical formula NbN. At low temperatures (about 16 K) NbN, niobium nitride becomes a superconductor, and is used in detectors for infrared light.

Material Notes

Niobium Nitride Sputtering Target, Purity is 99.5%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm. Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity.This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock.
 



Other Information of Niobium Nitride Sputtering Targets

Applications
  PVD (physical vapor deposition) and CVD (chemical vapor) deposition display
• Semiconductor

• Optical

Features
• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

Options
• 99% Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

 
 
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