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Sputtering Targets
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| Material | Formular | Purity | Sputtering Target | Evaporation Materials | |
|---|---|---|---|---|---|
| Pure Metal | Silicon (N-type) | Si | 99.999% | detail | detail |
| Pure Metal | Silicon (P-type) | Si | 99.999% | detail | detail |
| Pure Metal | Silicon (undoped) | Si | 99.999% | detail | detail |
| Alloy | Aluminum Silicon Copper | Al/Si/Cu | 99.9% | detail | |
| Alloy | Chrome/Silicon Monoxide | Cr/SiO 70/30 WT% | 99.9% | detail | |
| Compounds | Silicon Carbide | SiC | 99.5% | detail | |
| Compounds | Silicon Dioxide | SiO2 | 99.995% | detail | detail |
| Compounds | Silicon Monoxide | SiO | 99.9% | detail | detail |
| Compounds | Silicon Nitride | Si3N4 | 99.9% | detail |