Silicon Nitride Sputtering Targets (Si3N4)
| Material Type | Silicon Nitride |
| Symbol | Si3N4 |
| Color/Appearance | White to Gray or Dark Gray to Black, Crystalline Solid |
| Melting Point (°C) | 1,900 |
| Theoretical Density (g/cc) | 3.44 |
| Z Ratio | **1.00 |
| Sputter | RF, RF-R |
|
Max Power Density* (Watts/Square Inch) |
20 |
| Type of Bond | Indium, Elastomer |
Silicon Nitride Sputtering Targets
Silicon nitride is a chemical compound of the elements silicon and nitrogen, with the formula Si3N4. It is a white, high-melting-point solid that is relatively chemically inert, being attacked by dilute HF and hot H2SO4. It is tough (8.5 on the Mohs scale). It is the most thermodynamically stable of silicon nitrides. Si3N4 is the most commercially important of the silicon nitrides and is generally understood as "silicon nitride".
Silicon Nitride Sputtering Targets Information
Silicon Nitride Sputtering Targets
Purity: 99.5%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
Bonding is recommended for these materials. Many materials have characteristics that are not amenable to sputtering, such as brittleness and low thermal conductivity. This material may require a special ramp up and ramp down procedures. This process may not be necessary for other materials. Targets that have low thermal conductivity are susceptible to thermal shock.
More Information on Silicon Nitride Sputtering Targets
Applications• Chemical Vapor Deposition (CVD)• Physical Vapor Deposition (PVD) • Semiconductor • Optical |
Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options
• 99.5% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
|
Related Products of Silicon Nitride Sputtering Targets
|
|
Ceramic Sputtering Targets Silicon Dioxide Sputtering Target |
|
|
Evaporation Materials Silicon Evaporation Pellet |
Crucibles Quartz Crucible |
Metal Powders N/A |
Click to download datasheet about Silicon Nitride Sputtering Targets (Si3N4)
Unable to find the required data sheet? Click here to send an email and get it.
Click here to get answers to Frequently Asked Questions (FAQ).
Related Products
FREE QUOTE