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AEM Deposition

Silicon Dioxide Sputtering Targets (SiO2)

Silicon Dioxide Sputtering Targets (SiO2)
Silicon Dioxide Sputtering Targets (SiO2)Silicon Dioxide Sputtering Targets (SiO2)Silicon Dioxide Sputtering Targets (SiO2)Silicon Dioxide Sputtering Targets (SiO2)Silicon Dioxide Sputtering Targets (SiO2)
Material Type Silicon (IV) Oxide
Symbol SiO2
Color/Appearance White, Crystalline Solid
Melting Point (°C) 1,610
Theoretical Density (g/cc) ~2.65
Z Ratio **1.00
Sputter RF
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer
Comments Quartz excellent in E-beam.


Silicon dioxide, also known as silica (from the Latin silex), is an oxide of silicon with the chemical formula SiO2, most commonly found in nature as quartz and in various living organisms. In many parts of the world, silica is the major constituent of sand. Silica is one of the most complex and most abundant families of materials, existing as a compound of several minerals and as synthetic product. Notable examples include fused quartz, fumed silica, silica gel, and aerogels. It is used in structural materials, microelectronics, and as components in the food and pharmaceutical industries.

Material Notes

Silicon Dioxide Sputtering Targets, Purity is 99.995%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock.

Other Information of Silicon Dioxide Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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