Silicon Dioxide Sputtering Targets (SiO2)
| Material Type | Silicon (IV) Oxide |
| Symbol | SiO2 |
| Color/Appearance | White, Crystalline Solid |
| Melting Point (°C) | 1,610 |
| Theoretical Density (g/cc) | ~2.65 |
| Z Ratio | **1.00 |
| Sputter | RF |
|
Max Power Density* (Watts/Square Inch) |
30 |
| Type of Bond | Indium, Elastomer |
| Comments | Quartz excellent in E-beam. |
Silicon Dioxide Sputtering Targets
Silicon dioxide, also known as silica (from the Latin silex), is an oxide of silicon with the chemical formula SiO2, most commonly found in nature as quartz and in various living organisms. In many parts of the world, silica is the major constituent of sand. Silica is one of the most complex and most abundant families of materials, existing as a compound of several minerals and synthetic products. Notable examples include fused quartz, fumed silica, silica gel, and aerogels. It is used in structural materials, microelectronics, and components in the food and pharmaceutical industries.
Silicon Dioxide Sputtering Targets Information
Silicon Dioxide Sputtering Targets
Purity: 99.995%;
Circular: Diameter <= 14 inch, Thickness >= 1 mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1 mm.
This material may require a special ramp up and ramp down procedures. This process may not be necessary for other materials. Targets that have low thermal conductivity are susceptible to thermal shock.
More Information on Silicon Dioxide Sputtering Targets
Applications• Ferroelectric• Gate Dielectric • For CMOS |
Features• High purity• Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options
• 99.995% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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Related Products of Silicon Dioxide Sputtering Targets
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Ceramic Sputtering Targets Silicon Dioxide Sputtering Target |
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Evaporation Materials Silicon Evaporation Pellet |
Crucibles Quartz Crucible |
Metal Powders N/A |
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