What is the E-Beam Evaporation?
Electron Beam (E-Beam) Evaporation is a form of Physical Vapor Deposition. The target material used as a coating is bombarded with an electron beam from a charged tungsten filament to evaporate and convert it to a gaseous state for deposition on the material to be coated. In a high vacuum chamber, these atoms or molecules in a vapor phase then precipitate and form a thin-film coating on the substrate.
E-Beam Evaporation, a Thermal Evaporation process, and Sputtering are the two most common types of Physical Vapor Deposition (PVD). Of these two processes, The E-Beam Deposition technique has several clear advantages for many types of applications.
1. It permits the direct transfer of energy with the Electron Beam to the target material to be evaporated, making it ideal for metals with high melting points. Electron Beam Evaporation can yield significantly higher deposition rates - from 0.1 nm per minute to 100 nm per minute - resulting in higher density film coatings with increased adhesion to the substrate.
2. E-Beam Evaporation also has very high material utilization efficiency compared to other PVD processes reducing costs. The E-Beam system only heats the target source material, not the entire crucible, resulting in a lower degree of contamination from the crucible. By concentrating the energy on the target rather than the entire vacuum chamber, it helps reduce the possibility of heat damage to the substrate.
3. Several different layers of coating from different target materials can be applied with multiple crucible E-Beam evaporators without breaking the vacuum, making it adapt easily to various lift-off masking techniques.
Because of the high deposition rate and high material utilization efficiency. E-Beam Evaporation is used in various applications ranging from high-performance aerospace and automotive industries where high-temperatures and wear resistance are key to durable hard coatings for cutting tools for chemical barriers and coatings that protect surfaces in corrosive environments like marine fittings. Electron Beam Evaporation is used for optical thin-films ranging from laser optics, solar panels, eyeglasses, and architectural glass to give them the desired conductive, reflective, and transmissive qualities.
There are basically three types of E-Beam configurations for heating the target material: electromagnetic focusing, electromagnetic alignment, and pendant drop configuration.
AEM Deposition is an international evaporation materials manufacturer. We have over 10 years to produce and sell evaporation materials, including Pure Metal Evaporation Materials, Alloy Evaporation Materials, Oxide Evaporation Materials, and Compound Evaporation Materials. All materials are provided with various shapes, pieces, pellets, powder, rods, wires, or others. If you are interested in AEM Deposition’s evaporation materials, you can click the link to get more details.