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AEM Deposition

Aluminum Oxide Evaporation Material (Al2O3)

Aluminum Oxide Evaporation Material (Al2O3)
Aluminum Oxide Evaporation Material (Al2O3)
Material Type Aluminum Oxide
Symbol Al2O3
Color/Appearance White, Crystalline Solid
Melting Point (°C) 2,072
Theoretical Density (g/cc) 3.97
Z Ratio 0.336
E-Beam Excellent
Thermal Evaporation Techniques Boat:  W
Basket:  W
E-Beam Crucible Liner Material Fabmate®, Tungsten
Temp. (°C) for Given Vap. Press. (Torr) 10-4:  1,550
Comments Sapphire excellent in E-beam; forms smooth, hard films.


Aluminum oxide, or more commonly called alumina, is a chemical compound with a chemical formula of Al2O3. It is generally white or clear in appearance with a melting point of 2,072,°C a vapor pressure of 10-4 Torr at 1,550°C, and a density of 3.97 g/cc. It is most commonly found in nature as the mineral corundum, from which ruby and sapphire are derived. Aluminum oxide is used extensively as an abrasive and is utilized in various industrial applications. It can also be found in paint, cosmetics, and surgical implants. It is evaporated under vacuum to form dielectric films for the semiconductor industry and as a mirror-like protective layer for optical coating.

Material Notes

Aluminum Oxide Powder (Alumina Powder), Aluminum Oxide Pieces, Aluminum Oxide Compound, Aluminium Oxide Powder, purity is 99.99%

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