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Yttrium Oxide Evaporation Material (Y2O3)

Yttrium Oxide Evaporation Material (Y2O3)
Material Type Yttrium Oxide
Symbol Y2O3
Color/Appearance White, Crystalline Solid
Melting Point (°C) 2,410
Theoretical Density (g/cc) 5.01
Z Ratio **1.00
E-Beam Good
Thermal Evaporation Techniques Boat:  W
Crucible:  C
E-Beam Crucible Liner Material Fabmate®, Graphite, Tungsten
Temp. (°C) for Given Vap. Press. (Torr) 10-4:  ~2,000
Comments Loses oxygen; films smooth and clear.


Yttrium oxide is a chemical compound with a chemical formula of Y2O3. It is white in color with a melting point of 2,410°C, a density of 5.01 g/cc, and a vapor pressure of 10-4 Torr at ~2,000°C. It is considered to be the most important yttrium compound. Yttrium oxide is used to make phosphors which provide the color red in televisions and yttrium iron garnets are an important element of microwave filters. It is evaporated under vacuum for the fabrication of semiconductors and passive components.

Material Notes

AEM Deposition provides Yttrium Oxide pellets, Yttrium Oxide pieces, and Yttrium Oxide powder for sale, purity is 99.9%.

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