86-0731-89578196 [email protected]

Yttrium Aluminum Oxide Sputtering Targets (Y3Al5O12)

Yttrium Aluminum Oxide Sputtering Targets (Y3Al5O12)
Material Type Yttrium Aluminum Oxide
Symbol Y3Al5O12
Color/Appearance  Solid
Melting Point (°C) N/A
Density  4.56 g/mL
Molecular Weight 593.62
Exact Mass N/A



Yttrium Aluminum Oxide is a highly insoluble thermally stable Yttrium source suitable for glass, optic and ceramic applications. Oxide compounds are not conductive to electricity. Some of the commonly known synonyms of yttrium aluminum oxide are yttrium aluminate, yttrium aluminum garnet, aluminum yttrium oxide, ceralox and aluminum yttrium garnet.

Material Notes

Yttrium Aluminum Oxide Sputtering Targets, Purity is 99.99%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

Other Information of Yttrium Aluminum Oxide Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

Click for a downloadable datasheet on the Yttrium Aluminum Oxide Sputtering Targets (Y3Al5O12)
Can't find the downloadable datasheet you need? Click here to send email to get it.
Click here for answers to some of the most common questions we get asked.