86-0731-89578196 [email protected]

Yttrium Oxide Sputtering Targets (Y2O3)

Yttrium Oxide Sputtering Targets (Y2O3)
Material Type Yttrium Oxide
Symbol Y2O3
Color/Appearance White, Crystalline Solid
Melting Point (°C) 2,410
Theoretical Density (g/cc) 5.01
Z Ratio **1.00
Sputter RF, RF-R
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer
Comments Loses oxygen; films smooth and clear.


Yttrium oxide, also known as yttria, is Y2O3. It is an air-stable, white solid substance. Yttrium oxide is used as a common starting material for both materials science as well as inorganic compounds. The thermal conductivity of yttrium oxide is 27 W/(m*k)

Material Notes

Yttrium Oxide Sputtering Target, Purity is 99.9%; Circular: Diameter ? 14inch, Thickness ? 1mm; Block: Length ? 32inch, Width ? 12inch, Thickness ? 1mm. Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity.This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock.

Other Information of Yttrium Oxide Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

• 99.9% ex Strontium Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

Click for a downloadable datasheet on the Yttrium Oxide Sputtering Targets (Y2O3)
Can't find the downloadable datasheet you need? Click here to send email to get it.
Click here for answers to some of the most common questions we get asked.