Adhesion poor. Use interlayer (Cr). Evaporates using any source material.
Copper Sputtering Targets
Copper is a ductile metal with very high thermal conductivity, electrical conductivity, ductility, corrosion resistance. A freshly exposed surface of pure copper has a reddish-orange color. High-purity copper is used as various wires in the electrical and electronics industry, bonding wires for electronic packaging, high-quality audio cables and integrated circuits, liquid crystal display sputtering targets, and ion plating. It is also an indispensable valuable material in atomic energy, rockets, missiles, aviation, space navigation, and metallurgical industries. AEM offers high purity OFC, Cupronickel, and alloy products as per requirement.
AEM Deposition manufacture copper sputtering targets with high purity. The highest purity can reach to 99.9999%. The significant benefits are that your films possess an outstanding level of electrical conductivity and minimized particle formation during the PVD process. The analytical methods we use includes:
1. Metallic elements were analyzed using ICP-OES.
2. Gas elements were analyzed using LECO.
Below form is a Certificate of Analysis (COA) for 99.999% high purity Copper Sputtering Target:
• Competitive pricing
• High purity and density
• Grain refined, Engineered microstructure ( the average grain size < 50 um)
• Semiconductor grade
• Melting and casting
Electrical resistance furnace - Semi-continuous casting (VIM&EB)
• Grain refinement
Thermomechanical treatment (Forging, Rolling, Annealing)
• Cleaning and final packaging - Cleaned for use in vacuum
Protection from environmental contaminants
Protection during shipment
• 99.99% minimum purity
• Smaller sizes also available for R&D applications