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Barium Titanate Sputtering Targets (BaTiO3)

Barium Titanate Sputtering Targets (BaTiO3)
Material Type Barium Titanate
Symbol BaTiO3
Melting Point (°C) 1,625
Theoretical Density (g/cc) 6.02
Z Ratio 0.464
Sputter RF, DC
Max Power Density*
(Watts/Square Inch)
20
Type of Bond Elastomer
Comments Gives Ba. Co-evap and Sputter OK.

General

Barium titanate is the inorganic compound with the chemical formula BaTiO3. Barium titanate is a white powder and transparent as larger crystals. This titanate is a ferroelectric ceramic material, with a photorefractive effect and piezoelectric properties. It is used in capacitors, electromechanical transducers and nonlinear optics.

Material Notes

Barium Titanate Sputtering Targets, Purity is 99.9%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm. "Elastomer" Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity.
 


Other Information of Barium Titanate Sputtering Targets

Applications
  Ferroelectric
• Gate Dielectric

• For CMOS

Features
• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

Options
99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

 
 
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