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  • Application and Introduction of Sputtering Target for Flat Panel Display

    views, Updated: 2021-09-17
    Sputtering target has a wide range of applications. The industries with many sputtering targets are mainly concentrated in the integrated circuit, flat-panel display, solar cell, magnetic recording media, and optical devices.
    Among them, sputtering target material for flat-panel display is mainly used for ITO glass and touch screen electrode plate. Sputtering target coating is primarily used in the production of the display panel and touch screen panel. It is mainly used to make ITO glass and touch screen electrodes.
    Indium tin oxide (ITO) is the most widely used among the sputtering targets, followed by molybdenum, aluminum, silicon, and other metal targets. AEM Deposition provides sputtering targets suitable for flat-panel displays, as shown in the following table:

    ITO Sputtering Target Aluminum Sputtering Target Silicon Sputtering Target

    Panel production process of flat-panel display:
    1) In the production process of the flat-panel display panel, ITO glass is formed by sputtering and coating on a glass substrate many times. Then it is coated, processed, and assembled to produce an LCD panel, PDP panel, and OLED panel.
    2) For the production of a touch screen, ITO glass needs to be processed, coated to form electrodes, and then assembled with a protective screen and other components.
    Among them, the silicon dioxide film formed by the sputtering of silicon target mainly plays the role of increasing the adhesion and flatness of glass and ITO film, surface passivation and protection, and the etching of moalmo (molybdenum aluminum molybdenum) target after coating mainly plays the role of metal lead bridging.
    Also, in order to realize the anti-reflection and anti shadow functions of flat-panel display products, the corresponding coating can be added to the coating process. AEM Deposition, as a professional sputtering target manufacturer, provides not only sputtering targets for flat-panel display but also provides sputtering targets for other application fields. Please refer to the following table for details:
    If you need sputtering target materials, please click the link to enter the corresponding product page for more details.
    Pure Metal Sputtering Target Alloy Sputtering Target Oxide Sputtering Target Sulfide Sputtering Target
    Boride Sputtering Target Carbide Sputtering Target Silicide Sputtering Target
    Telluride Sputtering Target Nitride Sputtering Target Fluoride Sputtering Target