ITO Sputtering Targets (Indium Tin Oxide)

Indium tin oxide (ITO, In2O3/SnO2 90/10 WT%) is a ternary composition of Indium, Tin, and Oxygen in varying proportions. Depending on the oxygen content, it can either be described as a ceramic or alloy. Indium tin oxide is typically encountered as an oxygen-saturated composition with a formulation of 74% In, 18% O2, and 8% Sn by weight. Oxygen-saturated compositions are so typical that unsaturated compositions are termed oxygen-deficient ITO. It is transparent and colorless in thin layers, while in the bulk form, it is yellowish to grey. ITO is among the most heavily utilized compounds in the thin film industry due to its electrical conductivity and optical transparency. It is evaporated or sputtered under vacuum to generate transparent conductive layers in LCDs manufacturing and various optical coatings. Thin films of ITO are created for the development of sensors and a glass coating for the automotive industry.

 

Indium Tin Oxide  (ITO) sputtering target is widely used to form electrically transparent thin films. These films adopt direct current magnetron sputtering processes for electrodes in flat panel displays, solar cells, gas sensors, and so on. ITO sputtering target requires high purity, homogeneous microstructure, high density, and high electrical conductivity to improve ITO thin film property. ITO sputtering targets are being fabricated using In2O3-SnO2 mixed powders and tin-doped indium oxide powders.

The remaining material is unusable in the sputtering process. In the case of an ITO sputtering target, the unused portion can contain a significant amount of indium. It makes sense to reclaim or recycle as much of the target as possible. The target user will break up the remaining target into chunks. The chunk ITO is sent to a recycling/reclaim center where the chunk ITO is converted back into indium metal. And the cycle starts all over again.

More Information on ITO Sputtering Targets

Applications • FPD, Touch panel, Solar cells, LED • Semicoductor • Special glass, Freezer glass • Precision optics	Features • High purity and high density • Custom sizes available • Good roughness of target surface and low particle • Experienced application technolohy team
Manufacturing Process • Manufacturing - Hot pressed - Sintered, Elastomer bonded to backing plate • Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants Protection during shipment	Options • 99.99% minimum purity • Planar, Rotary, Slug avaliable • Variety composition such as 90/10,93/7,95/5,97/3,98/2 etc.