86-0731-89578196 [email protected]
AEM Deposition

Molybdenum Sputtering Targets (Mo)

Molybdenum Sputtering Targets (Mo)
Molybdenum Sputtering Targets (Mo)Molybdenum Sputtering Targets (Mo)Molybdenum Sputtering Targets (Mo)
Material Type Molybdenum
Symbol Mo
Atomic Weight 95.96
Atomic Number 42
Color/Appearance Grey, Metallic
Thermal Conductivity 139 W/m.K
Melting Point (°C) 2,617
Coefficient of Thermal Expansion 4.8 x 10-6/K
Theoretical Density (g/cc) 10.2
Z Ratio 0.257
Sputter DC
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer
Comments Films smooth, hard. Careful degas required.


Molybdenum is a silvery-grey metal with a Mohs hardness of 5.5. It has a melting point of 2,623 °C (4,753 °F); of the naturally occurring elements, only tantalum, osmium, rhenium, tungsten, and carbon have higher melting points. Weak oxidation of molybdenum starts at 300 °C (572 °F). It has one of the lowest coefficients of thermal expansion among commercially used metals. The tensile strength of molybdenum wires increases about 3 times, from about 10 to 30 GPa, when their diameter decreases from ~50–100 nm to 10 nm.

Material Notes

Molybdenum Sputtering Targets, Purity is 99.95%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.


Other Information of Molybednum Sputtering Targets

• Semiconductor
• Flat panel displays
Competitive pricing
• High purity
• Grain refined, engineered microstructure
• Semiconductor grade

Manufacturing Process
  Three-layer electrolytic process
• Melting and casting
  Electrical resistance furnace - Semi-continuous casting
• Grain refinement
  Thermomechanical treatment
• Cleaning and final packaging - Cleaned for use in vacuum
  Protection from environmental contaminants
  Protection during shipment
99.95% minimum purity
• Smaller sizes also available for R&D applications
• Sputtering target bonding service

Click for a downloadable datasheet on the Molybdenum Sputtering Targets (Mo)
Can't find the downloadable datasheet you need? Click here to send email to get it.
Click here for answers to some of the most common questions we get asked.