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AEM Deposition

Lithium Fluoride Evaporation Material (LiF)

Lithium Fluoride Evaporation Material (LiF)
Lithium Fluoride Evaporation Material (LiF)
Material Type Lithium Fluoride
Symbol LiF
Color/Appearance White, Crystalline Solid
Melting Point (°C) 845
Theoretical Density (g/cc) 2.64
Z Ratio 0.778
E-Beam Good
Thermal Evaporation Techniques Boat:  Ni, Ta, Mo, W
Crucible:  Al2O3
E-Beam Crucible Liner Material Tantalum, Tungsten, Molybdenum
Temp. (°C) for Given Vap. Press. (Torr) 10-8:  875
10-6:  1,020
10-4:  1,180
UN Number 3288
Comments Rate control important for optical films. Preheat gently to outgas.


Lithium fluoride is an inorganic compound with a formula of LiF. It has a density of 2.64 g/cc, a melting point of 845°C, and a vapor pressure of 10-4 Torr at 1,180°C. It is crystalline in appearance and white in color. One of its main uses is as a component of molten salts and it is evaporated under vacuum to form anti-reflective layers for optical coating.

Material Notes

AEM Deposition provides Lithium Fluoride pieces and Lithium Fluoride powder for sale, purity is 99.9%.

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