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AEM Deposition

Lithium Phosphate Sputtering Targets (Li3PO4)

Lithium Phosphate Sputtering Targets (Li3PO4)
Lithium Phosphate Sputtering Targets (Li3PO4)Lithium Phosphate Sputtering Targets (Li3PO4)Lithium Phosphate Sputtering Targets (Li3PO4)
Material Type Lithium Phosphate
Symbol Li3PO4
Color/Appearance White / Off-white, Solid
Melting Point (°C) >340
Theoretical Density (g/cc) 2.39
Water Solubility Insoluble
Sputter RF, RF-R, DC
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer


Material Notes

Lithium Phosphate Sputtering Targets, Purity is 99.99%; Circular: Diameter <= 14inch, Thickness <= 15mm; Block: Length <= 120 +/-0.1 mm, Width <= 120 +/-0.1 mm,Thickness <= 15 mm

Other Information of Lithium Phosphate Sputtering Targets

• Reactively deposited in partial pressure of nitrogen to produce LIPON (lithium phosphorous oxynitride)
• Electrolyte layer in rechargeable thin film batteries
Electrochromic glass 
• Lithium battery anode
• High purity
• High density
• Stoichiometric
• Phase pure
• Homogenous

Manufacturing Process
•  In-house powder synthesis, High purity precursor materials,  Wet chemistry process utilized for powder synthesis, High energy mixing, Specially formulated calcination schedule, Particle sizing processes
• Multiple step densification,  Proprietary processes employed for pressing and sintering
• Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants, Protection during shipment
• 99.99% purity
• Custom compositions may be available upon request
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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