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Lithium Zirconate Sputtering Targets (Li6Zr2O7)

Lithium Zirconate Sputtering Targets (Li6Zr2O7)
Material Type Lithium Zirconate
Symbol Li6Zr2O7
Color/Appearance White, Solid
Melting Point (°C) N/A
Theoretical Density (g/cc) N/A
Water Solubility Insoluble
Sputter RF, RF-R, DC
Max Power Density*
(Watts/Square Inch)
N/A
Type of Bond Indium, Elastomer
Comments  

General


Material Notes

Lithium Zirconate Sputtering Targets, Purity is 99.9%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

 

 



Other Information of Lithium Zirconate Sputtering Targets

Applications
  Ferroelectric
• Gate Dielectric

• For CMOS

Features
• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

Options
99.9% ex Strontium Minimum Purity

•Up to 12'' Diameter Targets Available

•Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

 
 
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