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AEM Deposition

Lithium Zirconate Sputtering Targets (Li6Zr2O7)

Lithium Zirconate Sputtering Targets (Li6Zr2O7)
Lithium Zirconate Sputtering Targets (Li6Zr2O7)
Material Type Lithium Zirconate
Symbol Li6Zr2O7
Color/Appearance White, Solid
Melting Point (°C) N/A
Theoretical Density (g/cc) N/A
Water Solubility Insoluble
Sputter RF, RF-R, DC
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer


Material Notes

Lithium Zirconate Sputtering Targets, Purity is 99.9%; Circular: Diameter <= 14inch,  Thickness <= 15 mm; Block: Length <= 120 +/-0.1 mm, Width <= 120 +/-0.1 mm,Thickness <= 15 mm. 


Other Information of Lithium Zirconate Sputtering Targets


  Negative Electrode Materials for Li-Ion and Li-Batteries

• High purity
• Custom Sizes Available

Manufacturing Process
•  In-house powder synthesis, High purity metal oxide precursor materials, High energy mixing, Particle sizing processes
• Multiple step densification, Proprietary processes employed for pressing and sintering
• Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants, Protection during shipment
99.9% Minimum Purity

Bonding Services Available, Elastomer bonding is recommended

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