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Lithium Cobalt Oxide Sputtering Targets (LiCoO2)

Lithium Cobalt Oxide Sputtering Targets (LiCoO2)
Material Type Lithium Cobalt Oxide
Symbol LiCoO2
Color/Appearance Black, Solid
Melting Point (°C) N/A
Theoretical Density (g/cc) 4.80
Water Solubility Insoluble
Sputter RF, RF-R, DC
Max Power Density*
(Watts/Square Inch)
Type of Bond Indium, Elastomer


Material Notes

Lithium Cobalt Oxide Sputtering Targets, Purity is 99.99%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

Other Information of Lithium Cobalt Oxide Sputtering Targets

 Cathode layer in rechargeable thin film batteries

• Gate Dielectric

• For CMOS

• High density

• Stoichiometric

• Electrically conductive at room temperature

• Phase pure

Manufacturing Process
•  In-house powder synthesis, High purity metal oxide precursor materials, High energy mixing, Particle sizing processes

• Multiple step densification, Proprietary processes employed for pressing and sintering

• Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants, Protection during shipment

99.99% purity
• Custom compositions may be available upon request
• Circular targets up to 12” (300 mm) diameter
• Planar tiles up to 8” (250 mm) X 5” (125 mm) for larger target configurations
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
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