86-0731-89578196 [email protected]

Lithium Cobalt Oxide Sputtering Targets (LiCoO2)

Lithium Cobalt Oxide Sputtering Targets (LiCoO2)
Material Type Lithium Cobalt Oxide
Symbol LiCoO2
Color/Appearance Black, Solid
Melting Point (°C) N/A
Theoretical Density (g/cc) 4.80
Water Solubility Insoluble
Sputter RF, RF-R, DC
Max Power Density*
(Watts/Square Inch)
N/A
Type of Bond Indium, Elastomer
Comments  

General


Material Notes

Lithium Cobalt Oxide Sputtering Targets, Purity is 99.99%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.


Other Information of Lithium Cobalt Oxide Sputtering Targets

Applications
 Cathode layer in rechargeable thin film batteries

• Gate Dielectric

• For CMOS

Features
• High density

• Stoichiometric

• Electrically conductive at room temperature

• Phase pure


Manufacturing Process
•  In-house powder synthesis, High purity metal oxide precursor materials, High energy mixing, Particle sizing processes

• Multiple step densification, Proprietary processes employed for pressing and sintering

• Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants, Protection during shipment

Options
99.99% purity
• Custom compositions may be available upon request
• Circular targets up to 12” (300 mm) diameter
• Planar tiles up to 8” (250 mm) X 5” (125 mm) for larger target configurations
• Smaller sizes also available for R&D applications
• Sputtering target bonding service
 
 
Click for a downloadable datasheet on the Lithium Cobalt Oxide Sputtering Targets (LiCoO2)
Can't find the downloadable datasheet you need? Click here to send email to get it.
Click here for answers to some of the most common questions we get asked.