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Zirconia Fully Stabilized with Yttria (YSZ) Sputtering Targets ZrO2 (fully stabilized - Y2O3)

Zirconia Fully Stabilized with Yttria (YSZ) Sputtering Targets ZrO2 (fully stabilized - Y2O3)
Material Type Yttria fully stabilized zirconia
Symbol ZrO2 / Y2O3 92/8 mol% or wt%, YSZ
Color/Appearance White/Off-white, Solid
Melting Point (°C) ~2,700
Relative Density (g/cc) 5.89
Water Solubility Insoluble
Sputter RF, RF-R, DC
Type of Bond Indium, Elastomer
Comments Films oxygen deficient, clear and hard.


Yttria-stabilized zirconia (YSZ) is a ceramic in which the crystal structure of zirconium dioxide is made stable at room temperature by an addition of yttrium oxide. These oxides are commonly called "zirconia" (ZrO2) and "yttria" (Y2O3), hence the name.

Material Notes

Zirconia Fully Stabilized with Yttria Sputtering Targets (YSZ) Sputtering Target, Purity is 99.9%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm. Partially Stabilized ZrO2 available upon request.Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity.This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock.


Other Information of Zirconia Fully Stabilized with Yttria Sputtering Targets

  Fuel cells

• Oxygen sensors

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

• 99.9% ex Strontium Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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