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Yttria-stabilized zirconia (YSZ) Sputtering Targets (Zr(1-x)YxO2)

Yttria-stabilized zirconia (YSZ) Sputtering Targets (Zr(1-x)YxO2)
Material Type Zirconia stabilized with Yttria
Symbol Zr(1-x)YxO2, YSZ
Color/Appearance White/Off-white, Solid
Melting Point (°C) ~2,500
Relative Density (g/cc) 5.89
Water Solubility Insoluble
Sputter RF, RF-R, DC
Type of Bond Indium, Elastomer
Comments Various composition available


Yttria-stabilized zirconia (YSZ) is a ceramic in which the crystal structure of zirconium dioxide is made stable at room temperature by an addition of yttrium oxide. These oxides are commonly called "zirconia" (ZrO2) and "yttria" (Y2O3). Yttria stabilized zirconia nanopowder is white in color and molecular weight are 349.03.

Material Notes

Zirconia stabilized with Yttria Sputtering Target, Purity is 99.9%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.


Other Information of Zirconia stabilized with Yttria Sputtering Targets

• Gate Dielectric

• For CMOS

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

• 99.9% ex Strontium Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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