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Zirconium Boride Sputtering Targets (ZrB2)

Zirconium Boride Sputtering Targets (ZrB2)
Material Type Zirconium Boride
Symbol ZrB2
Color/Appearance Dark Grey, Solid
Melting Point (°C) 3,000
Theoretical Density (g/cc) 6.085
Water Solubility Insoluble
Sputter RF, RF-R, DC
Type of Bond Indium, Elastomer


Zirconium diboride (ZrB2) is a highly covalent refractory ceramic material with a hexagonal crystal structure. ZrB2 is an ultra high temperature ceramic (UHTC) with a melting point of 3246°C . This along with its relatively low density of ~6.09 g/cm3 (measured density may be higher due to hafnium impurities) and good high temperature strength makes it a candidate for high temperature aerospace applications such as hypersonic flight or rocket propulsion systems. It is an unusual ceramic, having relatively high thermal and electrical conductivities, properties it shares with isostructural titanium diboride and hafnium diborid.

Material Notes

Zirconium Boride Sputtering Target, Purity is 99.5%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.

Other Information of Zirconium Boride Sputtering Targets

  PVD and CVD display
• Semiconductor

• Optical

• High purity
• Custom Sizes Available

Manufacturing Process
• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate

• Cleaning and final packaging, Cleaned for use in vacuum,
Protection from environmental contaminants
Protection during shipment

• 99% Minimum Purity

• Up to 12'' Diameter Targets Available

• Planar Tiles Up to 8'' X 5'' for Larger Target Configurations

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