Zirconium Boride Sputtering Targets (ZrB2)
| Material Type | Zirconium Boride |
| Symbol | ZrB2 |
| Color/Appearance | Dark Grey, Solid |
| Melting Point (°C) | 3,000 |
| Theoretical Density (g/cc) | 6.085 |
| Water Solubility | Insoluble |
| Sputter | RF, RF-R, DC |
| Type of Bond | Indium, Elastomer |
| Comments |
General
Zirconium diboride (ZrB2) is a highly covalent refractory ceramic material with a hexagonal crystal structure. ZrB2 is an ultra high temperature ceramic (UHTC) with a melting point of 3246°C . This along with its relatively low density of ~6.09 g/cm3 (measured density may be higher due to hafnium impurities) and good high temperature strength makes it a candidate for high temperature aerospace applications such as hypersonic flight or rocket propulsion systems. It is an unusual ceramic, having relatively high thermal and electrical conductivities, properties it shares with isostructural titanium diboride and hafnium diborid.
Material Notes
Zirconium Boride Sputtering Target, Purity is 99.5%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm.
Other Information of Zirconium Boride Sputtering Targets
|
Applications • PVD and CVD display • Semiconductor • Optical |
Features • High purity • Custom Sizes Available |
|
Manufacturing Process • Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate
• Cleaning and final packaging, Cleaned for use in vacuum, |
Options • 99% Minimum Purity • Up to 12'' Diameter Targets Available • Planar Tiles Up to 8'' X 5'' for Larger Target Configurations |
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